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Micro-opto-mechanical systems
Results: 57

#	Item
21	Global Concepts for Local Markets Welcome to the 6th Smart Systems Integration Conference 2012! Add to Reading List Source URL: www.smart-systems-integration.org Language: English - Date: 2012-03-30 07:06:19 Emerging technologies Microtechnology Smart system Systems engineering Micro-Opto-Electro-Mechanical Systems OLED CMOS Robert Bosch GmbH Wireless sensor network Technology Electronics Electronic engineering
22	TIME-MULTIPLEXED-PLASMA-ETCHING OF HIGH NUMERICAL APERTURE PARABOLOIDAL MICROMIRROR ARRAYS Kerwin Wang, Karl F. Böhringer Electrical Engineering Department, University of Washington Seattle, WA[removed]Phone[removed] Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-09 02:25:14 Technology Micro-Opto-Electro-Mechanical Systems Etching Mirror Deep reactive-ion etching Plasma Microlens Dry etching Reactive-ion etching Microtechnology Materials science Semiconductor device fabrication
23	HIGHLY SPACE-EFFICIENT ELECTROSTATIC ZIGZAG TRANSMISSIVE MICRO-OPTIC SWITCHES FOR AN INTEGRATED MEMS OPTICAL DISPLAY SYSTEM Kerwin Wang1, Karl F. Böhringer1, Mike Sinclair2, and Gary Starkweather2 of Washington, Seattle Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-08-07 23:33:00 Microelectromechanical systems Deformable mirror Microlens Micro-Opto-Electro-Mechanical Systems Comb drive Shutter Grating light valve Time-multiplexed optical shutter Microtechnology Materials science Technology
24	Microsoft Word - s7112846.doc Add to Reading List Source URL: www.mdpi.org Language: English - Date: 2007-11-20 03:01:53 Materials science Packaging Accelerometers Failure Semiconductor device fabrication Reliability engineering Reliability Microelectromechanical systems Micro-Opto-Electro-Mechanical Systems Technology Microtechnology Engineering
25	LOW -VOLTAGE LARGE ANGULAR DISPLACEMENT ELECTROSTATIC SCANNING MICROMIRROR USING FLOATING SLIDER MECHANISM 1 1 Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-11-07 11:50:11 Technology Microelectromechanical systems Piezoelectricity Bimorph Cantilever Comb drive Micro-Opto-Electro-Mechanical Systems Torsion spring Resonance Microtechnology Materials science Physics
26	PRISM Seminar Series – Spring 2009 Multiphysics and Multiscale Analysis of MEMS/NEMS Prof. N. R. Aluru University of Illinois at Urbana‐Champaign Department of Mechanical Science and Engineering Add to Reading List Source URL: www.purdue.edu Language: English Microtechnology Nanotechnology Nanoelectromechanical system Nanoelectronics Microelectromechanical systems University of Illinois at Urbana–Champaign Beckman Institute Micro-opto-mechanical systems RF MEMS Champaign County Illinois Materials science Illinois
27	Light: Science & Applications[removed], e94; doi:[removed]lsa[removed] ß 2013 CIOMP. All rights reserved[removed]www.nature.com/lsa ORIGINAL ARTICLE Add to Reading List Source URL: www.si-ware.com Language: English - Date: 2013-12-11 23:42:15 Technology Optical devices Photonics Laser science Optical fiber Optical cavity Micro-Opto-Electro-Mechanical Systems Microelectromechanical systems Optical ring resonators Materials science Optics Microtechnology
28	Best Student Paper Award Wide steering angle microscanner based on curved surface 1 Yasser Sabrya,b, Diaa Khalilb,c, Bassam Saadanyb, and Tarik Bourouinaa Add to Reading List Source URL: www.si-ware.com Language: English* - Date: 2013-12-11 23:44:22 Microtechnology Microscanner Micro-Opto-Electro-Mechanical Systems Laser beam profiler Laser scanning Microelectromechanical systems Laser Mirror Optical fiber Optics Technology Materials science
29	PRISM Seminar Series – Fall 2008 The Challenges of Micro‐System Product Development James J. Allen, Ph.D., P.E. Advanced MEMS Technologies Sandia National Laboratories Add to Reading List Source URL: www.purdue.edu Language: English Electromagnetism Mechanical engineering Engineering Micro-Opto-Electro-Mechanical Systems Microtechnology Technology Microelectromechanical systems
30	Chemnitz University of Technology Faculty of Electrical Engineering and Information Technology Center for Microtechnologies Competences Add to Reading List Source URL: www.enas.fraunhofer.de Language: English - Date: 2015-01-16 05:40:03 Microsystem Microelectromechanical systems Micro-Opto-Electro-Mechanical Systems Smart system Waterloo Institute for Nanotechnology RF MEMS Microtechnology Materials science Technology

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